Line narrowing module
NettetU.S. Patent Application 20240014168 for Line Narrowing Module. U.S. patent application number 16/571390 was filed with the patent office on 2024-01-09 for line narrowing … Nettet26. mar. 2007 · The GT61A ArF laser light source with ultra line narrowed spectrum, which meets the demand of hyper NA (NA > 1.3) immersion tool, is introduced. The GT61A aims at improving spectrum performance from value E95 0.5pm of GT60A. The spectrum performance 0.3pm or less was achieved by developing an ultra line narrowing …
Line narrowing module
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Nettetof the standard oscillator with a line narrowing module (LNM) design is shown in Fig. 2. A 1.2-m-long dis-charge tube provides gain to the oscillator. A narrow linewidth is achieved using an echelle grating, a prism beam expander, and a 30% reflectivity output coupler (OC). The apex angle of the right angle-fused silica ([email protected] nm ... Nettet16. mar. 2007 · The GT61A ArF laser light source with ultra line narrowed spectrum, which meets the demand of hyper NA (NA > 1.3) immersion tool, is introduced. The GT61A aims at improving spectrum performance from value E95 0.5pm of GT60A. The spectrum performance 0.3pm or less was achieved by developing an ultra line narrowing …
NettetWe claim: 1. A line narrowing module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of … Nettet7. nov. 2003 · The roadmap of semiconductor fabrication predicts that the semiconductor market will demand 65 nm node devices from 2004/2005. Therefore, an Ultra-Line-Narrowed F 2 laser for dioptric projection systems has been developed under the ASET project of "The F 2 Laser Lithography Development Project". The target of this project is …
NettetThe line-narrowing module shown includes a prism beam expander including three prisms 30, 30 and 36, an etalon 34 and a grating 38. Each of the prisms 30, 32 and 36, and the plates of the etalon 34 of a line-narrowing module of a conventional KrF laser comprises fused silica due to its transparency at 248 nm. NettetWhen modified using a specially developed line-narrowing module, the laser produces an average output power of ~0.5W in a minimum linewidth of <5pm FWHM. With this module, the laser may be tuned between wavelengths of 192.75 - 193.75nm and the bandwidth selected between 370-5pm FWHM. Figure 1. Exitech 193nm excimer laser …
Nettet13. mai 2024 · Variables such as load, orientation, speed, travel, precision, environment, and duty cycle can all affect the working life of linear motion components. Extreme …
NettetIn a spectrally narrowed laser, a line-narrowing subsystem is added to the rear of the laser. This module reduces the optical bandwidth from the free-running width of about 300 pm down to 1–3 pm. Figure 8.10 shows the KrF gain profile and the narrowing required for laser stepper lenses (all-refractive). creme vodkaNettet9. jul. 2024 · WO2006060360A2 - Line narrowing module - Google Patents Line narrowing module Download PDF Info Publication number WO2006060360A2. … creme tzatzikiNettetThe line-narrowing module shown includes a prism beam expander including three prisms 30, 30 and 36, an etalon 34 and a grating 38. Each of the prisms 30, 32 and 36, … creme yonka avisNettet16. mar. 2007 · The spectrum performance 0.3pm or less was achieved by developing an ultra line narrowing module newly. Moreover, in 45nm node, since it indispensably … اسقف جبس بورد cncNettet1. jan. 2002 · The spectrum performance 0.3pm or less was achieved by developing an ultra line narrowing module newly. Moreover, in 45nm node, since it indispensably requires OPC ... creme zeta skinNettet18. mai 2005 · component f or narrowing the laser line of DUV lithography excimer lasers. Rigorous theoretical investigations show that lamellar ridge gratings c an reac h up to more than 90% efficiency. اسقف جبس بورد dwgNettet21. feb. 2015 · How can I a make a HTML parent element adjust its width, when a child element text wraps to a new line? Do I need to use javascript or can it be done with … creme vor make-up dm